超純水

作者:水商網
超純水含義:

超純水(Ultrapure water)極為接近高純度的水,即除了氫離子與氫氧根離子,幾乎沒有任何其他電解質存在的水。在制造處理過程后能盡可能將溶在水中或在水中散播的各種雜質除去,包含像是有機物、細菌、塵埃、氧化物等任何物質。

根據半導體產業的發展,隨著制程的開發,使得晶圓線路更加細致,所使用的清洗用水,也需要更加提升。為了介于以往的純水名稱,故命名為超純水。電阻率約達到18.2MΩ-cm,幾乎不能導電,依據電子行業超純水標準,還有很多其他的指標要求。
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